As the promise of EUV (extreme-ultraviolet) lithography fades, the old war-horse, 193 nm, is again rising up to fill the gap. By immersing the wafer and the front element of the lens in water, stepper ...
SANTA CLARA, Calif. — In a move to keep up with growing demand for its lithography-lens materials, Corning Inc. is aggressively ramping up production of these products in its new plant in Canton, N.Y.
Corning teams up with a UK-based systems integrator and a Japanese research group to develop essential tools for next-generation lithography. Corning Tropel, a subsidiary of Corning, claims to have ...